Potter, DB;
Powell, MJ;
Parkin, IP;
Carmalt, CJ;
(2018)
Aluminium/gallium, indium/gallium, and aluminium/indium co-doped ZnO thin films deposited via aerosol assisted CVD.
Journal of Materials Chemistry C
, 6
(3)
pp. 588-597.
10.1039/c7tc04003b.
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Abstract
Aluminium/gallium co-doped ZnO (AGZO), indium/gallium co-doped ZnO (IGZO), and aluminium/indium co-doped ZnO (AIZO) thin films were synthesised on glass substrates via aerosol assisted chemical vapour deposition (AACVD). The films were fully characterised by X-ray diffraction, X-ray photoelectron spectroscopy and scanning electron microscopy. The optoelectronic properties of the films were determined using UV/vis spectroscopy and Hall effect measurements. The AGZO film displayed the lowest resistivity (1.3 × 10−2 Ω cm) and highest carrier mobility (7.9 cm2 V−1 s−1), due the relatively low amount of disorder in the structure. The incorporation of In3+ resulted in the most disorder in the structure due to its large radius, which led to an increase in optical absorption, and a decrease in resistivity.
| Type: | Article |
|---|---|
| Title: | Aluminium/gallium, indium/gallium, and aluminium/indium co-doped ZnO thin films deposited via aerosol assisted CVD |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1039/c7tc04003b |
| Publisher version: | http://dx.doi.org/10.1039/c7tc04003b |
| Language: | English |
| Additional information: | This article is licensed under a Creative Commons Attribution 3.0 Unported Licence (https://creativecommons.org/licenses/by/3.0/) |
| Keywords: | CHEMICAL-VAPOR-DEPOSITION, ZINC-OXIDE FILMS, TRANSPARENT CONDUCTING OXIDES, DONOR FUNCTIONALIZED ALCOHOLS, PULSED-LASER DEPOSITION, MOLECULAR-BEAM EPITAXY, ELECTRICAL-PROPERTIES, SPRAY-PYROLYSIS, SUBSTRATE-TEMPERATURE, PHYSICAL-PROPERTIES |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery-pp.ucl.ac.uk/id/eprint/10043458 |
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