Serra, E;
Morana, B;
Borrielli, A;
Marin, F;
Pandraud, G;
Pontin, A;
Prodi, GA;
... Bonaldi, M; + view all
(2018)
Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics.
Journal of Microelectromechanical Systems
, 27
(6)
pp. 1193-1203.
10.1109/JMEMS.2018.2876593.
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Abstract
IEEE Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies. In this paper, we present a nano-oscillator made of a high-stress round-shaped SiN membrane with an integrated on-chip 3-D acoustic shield properly designed to reduce mechanical losses. This oscillator works in the range of 200 kHz to 5 MHz and features a mechanical quality factor of Q ≃10⁷ and a Q-frequency product in excess of 6.2 x 10¹² Hz at room temperature, fulfilling the minimum requirement for quantum ground-state cooling of the oscillator in an optomechanical cavity. The device is obtained by MEMS deep reactive-ion etching (DRIE) bulk micromachining with a two-side silicon processing on a silicon-on-insulator wafer. The microfabrication process is quite flexible such that additional layers could be deposited over the SiN membrane before the DRIE steps, if required for a sensing application. Therefore, such oscillator is a promising candidate for quantum sensing applications in the context of the emerging field of quantum technologies.
| Type: | Article |
|---|---|
| Title: | Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1109/JMEMS.2018.2876593 |
| Publisher version: | http://doi.org/10.1109/JMEMS.2018.2876593 |
| Language: | English |
| Additional information: | This version is the author accepted manuscript. For information on re-use, please refer to the publisher’s terms and conditions. |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Physics and Astronomy |
| URI: | https://discovery-pp.ucl.ac.uk/id/eprint/10062449 |
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