Simon, M;
Masserey, B;
Robyr, JL;
Fromme, P;
(2019)
High frequency guided wave defect imaging in monocrystalline silicon wafers.
In:
Proceedings of SPIE - The International Society for Optical Engineerin.
SPIE: Denver, Colorado, United States.
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Abstract
Micro-cracks can be induced in thin monocrystalline silicon wafers during the manufacture of solar panels. High frequency guided waves allow for the monitoring of wafers and characterization of defects. Selective excitation of the first anti-symmetric A0 guided wave mode was achieved experimentally using a custom-made wedge transducer. The Lamb wave scattered field in the vicinity of artificial defects was measured using a noncontact laser interferometer. The surface extent of the shallow defects varying in size from 30 µm to 100 µm was characterized using an optical microscope. The characteristics of the scattered wave field were correlated to the defect size and the detection sensitivity was discussed.
| Type: | Proceedings paper |
|---|---|
| Title: | High frequency guided wave defect imaging in monocrystalline silicon wafers |
| Event: | SPIE SMART STRUCTURES + NONDESTRUCTIVE EVALUATION 3-7 March 2019 |
| ISBN-13: | 9781510625990 |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1117/12.2513675 |
| Publisher version: | https://doi.org/10.1117/12.2513675 |
| Language: | English |
| Additional information: | This version is the version of record. For information on re-use, please refer to the publisher’s terms and conditions. |
| Keywords: | Monocrystalline Silicon, Lamb Waves, Scattering, Ultrasonics |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Mechanical Engineering |
| URI: | https://discovery-pp.ucl.ac.uk/id/eprint/10079433 |
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