Zhao, D;
Sathasivam, S;
Li, J;
Carmalt, CJ;
(2020)
Transparent and Conductive Molybdenum-Doped ZnO Thin Films via Chemical Vapor Deposition.
ACS Applied Electronic Materials
, 2
(1)
pp. 121-125.
10.1021/acsaelm.9b00647.
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Abstract
Extrinsically doped ZnO is widely used as a transparent conducting electrode and has the potential to alleviate the demand on the expensive but ubiquitous Sn-doped In2O3. Here, we report for the first time the synthesis and characterization of molybdenum-doped ZnO via a chemical vapor deposition route. Films were grown by using diethylzinc, molybdenum hexacarbonyl, toluene, and methanol. All films had visible light transmittance of ∼80% and electrical resistivity of 10–3 Ω·cm with the lowest resistivity of 2.6 × 10–3 Ω·cm observed for the 0.57 at. % Mo-doped film. X-ray photoelectron spectroscopy of the surface species and X-ray diffraction based calculations of the ZnO unit cell parameters suggest that Mo is present in the 4+ oxidation state, thus contributing two electrons for electrical conduction for every Zn2+ ion replaced in the lattice.
| Type: | Article |
|---|---|
| Title: | Transparent and Conductive Molybdenum-Doped ZnO Thin Films via Chemical Vapor Deposition |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1021/acsaelm.9b00647 |
| Publisher version: | https://doi.org/10.1021/acsaelm.9b00647 |
| Language: | English |
| Additional information: | This version is the author accepted manuscript. For information on re-use, please refer to the publisher’s terms and conditions. |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery-pp.ucl.ac.uk/id/eprint/10090766 |
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