Potts, SE;
(2011)
Plasma-Enhanced ALD: Precursor Considerations for Opening the ALD Temperature Window.
Presented at: 1st ENHANCE Winter School, Bochum, Germany.
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| Type: | Conference item (Presentation) |
|---|---|
| Title: | Plasma-Enhanced ALD: Precursor Considerations for Opening the ALD Temperature Window |
| Event: | 1st ENHANCE Winter School |
| Location: | Bochum, Germany |
| Dates: | 25 - 28 January 2011 |
| Open access status: | An open access version is available from UCL Discovery |
| Publisher version: | https://www.ucl.ac.uk/chemistry/ |
| Language: | English |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery-pp.ucl.ac.uk/id/eprint/10114973 |
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