Storey, ACG;
Sabouri, A;
Khanna, R;
Ahmed, U;
Perez-Martinez, CS;
(2024)
Filtering the beam from an ionic liquid ion source.
Journal of Vacuum Science and Technology B
, 42
(6)
, Article 064201. 10.1116/6.0004029.
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Abstract
Ionic liquid ion sources (ILIS) have been proposed as a source of alternative ion chemistries for surface etching, focused ion beams, and secondary ion mass spectrometry. These ion sources produce polydisperse ion beams containing several solvated ion species with a distribution of energies, and it is necessary to filter the ion beam to obtain monoenergetic beams with a single ion chemistry as required by nanomanufacturing and analytical applications. In this work, a Wien filter has been designed, built, and tested for use with an ILIS using the liquid 1-ethyl-3-methylimidazolium tris(pentafluoroethyl)trifluorophosphate, or EMI-FAP. comsol multiphysics simulations have been used to validate the design. The full and unfiltered ion beams have been characterized using time-of-flight mass spectrometry and retarding potential analysis, and these measurements confirm that the filter is effective in isolating monomer ions from heavier ion species in the beam.
| Type: | Article |
|---|---|
| Title: | Filtering the beam from an ionic liquid ion source |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1116/6.0004029 |
| Publisher version: | https://doi.org/10.1116/6.0004029 |
| Language: | English |
| Additional information: | This work is licensed under a Creative Commons License. The images or other third-party material in this article are included in the Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology |
| URI: | https://discovery-pp.ucl.ac.uk/id/eprint/10203058 |
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