Ashraf, S;
Blackman, CS;
Naisbitt, SC;
Parkin, IP;
(2008)
The gas-sensing properties of WO3-x thin films deposited via the atmospheric pressure chemical vapour deposition (APCVD) of WCl6 with ethanol.
Measurement Science and Technology
, 19
(2)
, Article 025203. 10.1088/0957-0233/19/2/025203.
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Abstract
The use of the APCVD reaction of WCl6 with ethanol to produce tungsten oxide films (3600-6700 nm thick) for use as gas sensors is presented. The response of these films to varying concentrations of ethanol and NO2 at varying temperatures has been examined. A comparison of the CVD sensors to a thick film (similar to 60 mu m) screen-printed sensor has shown that the CVD sensors have a faster rate of response, a stable sensing response and faster return to baseline with no drift at the conditions examined.
| Type: | Article |
|---|---|
| Title: | The gas-sensing properties of WO3-x thin films deposited via the atmospheric pressure chemical vapour deposition (APCVD) of WCl6 with ethanol |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1088/0957-0233/19/2/025203 |
| Publisher version: | http://dx.doi.org/10.1088/0957-0233/19/2/025203 |
| Language: | English |
| Additional information: | This is an author-created, un-copyedited version of an article accepted for publication in Measurement Science and Technology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at http://dx.doi.org/10.1088/0957-0233/19/2/025203 |
| Keywords: | CVD, tungsten oxide, TUNGSTEN-OXIDE, CARBON-MONOXIDE, SENSOR, MODEL |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery-pp.ucl.ac.uk/id/eprint/143109 |
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