Potts, SE;
Kessels, E;
Lachaud, C;
(2011)
Plasma-Enhanced and Thermal ALD of Al₂O₃ from Dimethylaluminium Isopropoxide, [Al(CH₃)₂(µ-OⁱPr)]₂.
Presented at: EUROCVD18, Cork, Ireland.
Preview |
Text (Abstract)
SEPotts_EuroCVD18_Abstract.pdf - Accepted Version Download (24kB) | Preview |
Preview |
Text (Presentation)
SEPotts_EuroCVD18.pdf - Submitted Version Download (835kB) | Preview |
| Type: | Conference item (UNSPECIFIED) |
|---|---|
| Title: | Plasma-Enhanced and Thermal ALD of Al₂O₃ from Dimethylaluminium Isopropoxide, [Al(CH₃)₂(µ-OⁱPr)]₂ |
| Event: | EUROCVD18 |
| Location: | Cork, Ireland |
| Dates: | 04 - 09 September 2011 |
| Open access status: | An open access version is available from UCL Discovery |
| Publisher version: | https://www.rsc.org/events/detail/6092/eurocvd18/c... |
| Language: | English |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery-pp.ucl.ac.uk/id/eprint/10114897 |
Downloads since deposit
1,694Downloads
Download activity - last month
Download activity - last 12 months
Downloads by country - last 12 months
Archive Staff Only
 |
View Item |
